Nanofabrication Laboratory
Core Research Facility: 44 Resources found

Acid Hood-Etch/Strip
Nano Fabrication Laboratory stocks acetone and IPA. Users are responsible for ordering of their own chemicals and materials. Auxiliary - No additional charge


Acid Hood-Pre Clean
Nano Fabrication Laboratory stocks acetone and IPA. Users are responsible for ordering of their own chemicals and materials. Auxiliary - No additional charge


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Atomic Layer Deposition
FIJI
System Specification The Clean Room Entrance Fee is required in addition to the hourly rate. Please book both the tool and the "Clean Room Entrance". Training Requirements Estimates: 1 hour Substrate size Up to 200 mm Dimensions (w x d x h) F200: 1075 x 570 x 2130 mm F202: 1075 x 1140 x 2130 mm F200 with load lock: 2340 x 570 x 2130 mm Cabinet Removable aluminum panels, adjustable feet, optional cleanroom interface Deposition Modes High speed, high aspect ratio*, plasma-assisted Operational Modes Continuous Mode™ (high speed), Exposure Mode™, (high aspect ratio), Plasma Mode™ (plasma-assisted) Power 220-240 VAC, 4500 W per reactor (excluding pump) Control LabVIEW™, USB, Windows™ PC Substrate Temperature 500 °C (optional up to 800 °C) Deposition Uniformity (Al2O3) 1.5% (1􀄱) Vacuum Pump Optional dry pump, >50 CFM required, optional mag-lev turbo pump Compatibility Cleanroom class 100 compatible Compliance CE, CSA Options 4 plasma lines standard, up to 6 lines available per reactor. In-situ analysis ports (ellipsometry, mass spectrometry, OES), glove box integration, load lock with manual or motorized transfer arm
5 Documents Available


Industry Rates
Self:$101/hr
Service:$263/hr
Training:$361/hr
Base Develop Hood
Nano Fabrication Laboratory stocks acetone and IPA. Users are responsible for ordering of their own chemicals and materials Auxiliary - No additional charge


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Bio-Bay
250 Square Feet Area 1
Class 10,000 BSL2 cleanroom, (testing out to well below Class 100). · ESD controlled flooring and Ionizers · Baker BSL2 Hoods · Wet station for lab ware · Wi-Fi and Land Line Access · 250 square feet of usable space


Industry Rates
Special:$150/day
Chem Cart and Desicator Cabinets
Auxiliary No additional charge


Clean Room Experiment Area
100 Square Feet
Clean Room Experimental Bay Discuss with Lab Director Prior to reservation


Industry Rates
Self:$277/day
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Clean Room Entry Fee
Entry fee for use of ancillary equipmet and supplies.


Industry Rates
Special:$32/day
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Clean Room Technical Assistance
Labor only costs related to non-instrument related labor of NFL staff


Industry Rates
Service:$162/hr
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CNT/Graphene
Aixtron Black Magic 4"
Training Requirements Estimates: 4 hours The Clean Room Entrance Fee is required in addition to the hourly rate. Please book both the tool and the "Clean Room Entrance". Carbon nano tube deposition. This system can do both thermal and plasma based depositions. Permits mono layer graphene, vertical carbon nano tubes and well as single and double wall CNT’s
1 Document Available


Industry Rates
Self:$101/hr
Service:$263/hr
Training:$361/hr
CVD Tube Furnace


Industry Rates
Self:No Charge
Service:No Charge
Training:No Charge
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Dicing Saw
K & S 7100
Training Requirements Estimates: 4 hours The Clean Room Entrance Fee is required in addition to the hourly rate. Please book both the tool and the "Clean Room Entrance".
4 Documents Available


Industry Rates
Self:$101/hr
Service:$263/hr
Training:$361/hr
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Digital Microscope
Keyence VHX-2000
Keyence 3D Digital Microscope with a large working distance .1X-5000X Note: all equipment is reserved in increments of 30min Tier 1 Max reservation time is 1 hour, unless approved by Nanofabrication Lab Staff


Industry Rates
Self:$20/hr
Service:$182/hr
Training:$280/hr
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Direct Write E-Beam Lithography System
Raith
Electron Beam Lithography/Imaging 150Two - Manufacturer: Raith Nano Fabrication Laboratory - Clean room 164 Training Requirements Estimates: 4 to 6 hours *Daily Entry Fee is required* Please create a "Daily Entry Fee" reservation in addition to Raith tool reservation. The Raith 150two is an electron beam write system that can image to less than 10 nanometers. Main Applications: Nano-lithography Imaging Low voltage Electron Beam Lithography Column: Gemini Electron 30 kV Inlense SE detector Energy selective BSE (EsB) detector option Stage: Large Z travel
10 Documents Available


Industry Rates
Self:$116/hr
Service:$278/hr
Training:$376/hr
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E-Beam Evaporator
CHA
Nano Fabrication Laboratory stocks acetone and IPA. Users are responsible for ordering of their own chemicals and materials Training Time = 1.5hrs Requires a 1hr minimum Self Reservation ATTENTION: All crucible and planetary changes are performed by Nano Fabrication Staff only. Gold is crucible is not kept in the E-beam. Should you require a specific metal and/or planetary please detail your request in your Reservation. There is an additional charge for depositing Gold. Please Book "Gold" for each run in 1000 Angstrom increments. Note: Rise and Soak steps use up most of the material. 0-1000 = $80 1001-2000 = $160 2001-3000 = $240 IT IS NOT CUMULATIVE RUN TO RUN. There may be additional charges for using precious metals such as Gold and Platinum CHA 6 Pocket Electron Beam Evaporator that also has a thermal source. This system is capable of “Co-Deposition” i.e. the capability to co-deposit two materials simultaneously using two separate evaporation sources. Each evaporation source has its own thickness monitor for independent rate control so that the ratios of the two materials can be precisely controlled. The CHA solution system is designed to do both lift off (uni-directional) and conformal coatings. http://www.chaindustries.com/solution.html It is both 4" and 6" capable
7 Documents Available


Industry Rates
Self:$101/hr
Service:$263/hr
Training:$361/hr
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Ellipsometer
Woolam
Note: all equipment is reserved in increments of 30min The Alpha SE provides the University with a unique capability for measuring very thin dielectric films (<100 nm) and calculating the index of refraction of said films. It is also capable of measuring liquids which is of use to the Bio Bay users. JA Woolam also provides a applications and support staff of 9 engineers to assist researchers. This tool is critical for completing a measurement suite (with the Filmetrix) to measure materials thinner than 100nm and films that cannot be measured at normal incidence.
4 Documents Available


Industry Rates
Self:$20/hr
Service:$182/hr
Training:$280/hr
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Film Stress Measurement System
Toho Flexus
Note: all equipment is reserved in increments of 30min The Clean Room Entrance Fee is required in addition to the hourly rate. Please book both the tool and the "Clean Room Entrance".
1 Document Available


Industry Rates
Self:$20/hr
Service:$182/hr
Training:$280/hr
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Filmetric
Note: all equipment is reserved in increments of 30min The Clean Room Entrance Fee is required in addition to the hourly rate. Please reserve both the tool and the "Clean Room Entrance".
2 Documents Available


Industry Rates
Self:$20/hr
Service:$182/hr
Training:$280/hr
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General Lab Training


Industry Rates
Assisted:No Charge
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Gold
EA=1 gram of gold per 1000 Angstroms of deposition


Industry Rates
Special:$83/ea

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