Nanofabrication Laboratory: 62 Resources found

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2GB Flash Drive
Please see clean room staff to pick up your reserved stock room item.


Industry Rates
Special:$5/ea
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Acid Hood-Etch/Strip
Nano Fabrication Laboratory stocks acetone and IPA. Users are responsible for ordering of their own chemicals and materials. Auxiliary - No additional charge


Acid Hood-Pre Clean
Nano Fabrication Laboratory stocks acetone and IPA. Users are responsible for ordering of their own chemicals and materials. Auxiliary - No additional charge


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Atomic Layer Deposition
FIJI
Daily user entrance fee required Please book in increments of 30min System specification ALD with Loadlock Capable of Plasma or Thermal ALD Substrate size: Up to 200mm Substrate Temperature: up to 500C Precursors Available: Al, Hf, Pt, Sio2, Nb, others on request Training is required before use
6 Documents Available


Industry Rates
Self:$135/hr
Service:$463/hr
Training:$463/hr
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Base Develop Hood
Nano Fabrication Laboratory stocks acetone and IPA. Users are responsible for ordering of their own chemicals and materials Auxiliary - No additional charge


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CD-26 Developer, 1 Gallon Bottle
Please see clean room staff to pick up your reserved stock room item.


Industry Rates
Special:$46/ea
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Chem Cart and Desicator Cabinets
Auxiliary No additional charge


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Chrome Mask Etch CE-5M - 1 quart
Please see clean room staff to pick up your reserved stock room item.


Industry Rates
Special:$38/ea
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Clean Room Experiment Area
100 Square Feet
Clean Room Experimental Bay Discuss with Lab Director Prior to reservation


Industry Rates
Self:$277/day
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Clean Room Entry Fee
Entry fee for use of ancillary equipmet and supplies.


Industry Rates
Special:$32/day
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Clean Room Technical Assistance
Labor only costs related to non-instrument related labor of NFL staff


Industry Rates
Service:$335/hr
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Cleanroom Notebook, 8.5" x 11"
Please see clean room staff to pick up your reserved stock room item.


Industry Rates
Special:$19/ea
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CNT/Graphene
Aixtron Black Magic 4"
Training Requirements Estimates: 4 hours The Clean Room Entrance Fee is required in addition to the hourly rate. Please book both the tool and the "Clean Room Entrance". Carbon nano tube deposition. This system can do both thermal and plasma based depositions. Permits mono layer graphene, vertical carbon nano tubes and well as single and double wall CNT’s
2 Documents Available


Industry Rates
Self:$135/hr
Service:$463/hr
Training:$463/hr
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CVD Tube Furnace


Industry Rates
Self:$135/hr
Service:$463/hr
Training:$463/hr
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Dicing Saw
Disco 3221
Service work only Requires completion of sample application.


Industry Rates
Service:$463/hr
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Digital Microscope
Keyence VHX-2000
Keyence 3D Digital Microscope with a large working distance .1X-5000X Note: all equipment is reserved in increments of 30min Tier 1 Max reservation time is 1 hour, unless approved by Nanofabrication Lab Staff
1 Document Available


Industry Rates
Self:$23/hr
Service:$357/hr
Training:$357/hr
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Direct Write E-Beam Lithography System
Raith
Raith Electron Beam Lithography/Imaging 150Two Training Requirements Estimates: 4 to 6 hours *Daily Entry Fee is required* Please create a "Daily Entry Fee" reservation in addition to Raith tool reservation. The Raith 150two is an electron beam write system that can image to less than 10 nanometers. Main Applications: Nano-lithography, Imaging Up to 30kV SE and BSE detectors
1 Document Available


Industry Rates
Self:$158/hr
Service:$480/hr
Training:$480/hr
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E-Beam Evaporator
CHA
Training Time = 1.5hrs Requires a 1.5hr minimum Self Reservation ATTENTION: All crucible and planetary changes are performed by Nano Fabrication Staff only. Gold is crucible is not kept in the E-beam. Should you require a specific metal and/or planetary please detail your request in your Reservation. See below for complete list of available materials. There is an additional charge for depositing Gold. Please Book "Gold" for each run in 1000 Angstrom increments. Note: Rise and Soak steps use up most of the material. 0-1000 = $80 1001-2000 = $160 2001-3000 = $240 IT IS NOT CUMULATIVE RUN TO RUN. There may be additional charges for using precious metals such as Gold and Platinum 4" and 6" capable Evaporation Materials Chrome,Titanium, Nickel, Tantalum, Silver, Gold, Germanium, Cobalt, Tin, Silicon, Silicon Dioxide, Palladium, Titanium Dioxide, Hafnium Oxide, Platinum, Aluminum, Aluminum Oxide, Copper CHA 6 Pocket Electron Beam Evaporator that also has a thermal source. This system is capable of “Co-Deposition” i.e. the capability to co-deposit two materials simultaneously using two separate evaporation sources. Each evaporation source has its own thickness monitor for independent rate control so that the ratios of the two materials can be precisely controlled. The CHA solution system is designed to do both lift off (uni-directional) and conformal coatings. http://www.chaindustries.com/solution.html
7 Documents Available


Industry Rates
Self:$158/hr
Service:$480/hr
Training:$480/hr
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Ellipsometer
Woolam
Note: all equipment is reserved in increments of 30min The Alpha SE provides the University with a unique capability for measuring very thin dielectric films (<100 nm) and calculating the index of refraction of said films. It is also capable of measuring liquids which is of use to the Bio Bay users. JA Woolam also provides a applications and support staff of 9 engineers to assist researchers. This tool is critical for completing a measurement suite (with the Filmetrix) to measure materials thinner than 100nm and films that cannot be measured at normal incidence.
5 Documents Available


Industry Rates
Self:$23/hr
Service:$357/hr
Training:$357/hr
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Film Stress Measurement System
Toho Flexus
Note: all equipment is reserved in increments of 30min The Clean Room Entrance Fee is required in addition to the hourly rate. Please book both the tool and the "Clean Room Entrance".
2 Documents Available


Industry Rates
Self:$23/hr
Service:$357/hr
Training:$357/hr

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