Nanofabrication Laboratory: 64 Resources found

Please see clean room staff to pick up your reserved stock room item.

Nano Fabrication Laboratory stocks acetone and IPA. Users are responsible for ordering of their own chemicals and materials. Auxiliary - No additional charge

Nano Fabrication Laboratory stocks acetone and IPA. Users are responsible for ordering of their own chemicals and materials. Auxiliary - No additional charge

Daily user entrance fee required Please book in increments of 30min System specification ALD with Loadlock Capable of Plasma or Thermal ALD Substrate size: Up to 200mm Substrate Temperature: up to 500C Precursors Available: Al, Hf, Pt, Si, Nb, Ti others on request Training is required before use

Nano Fabrication Laboratory stocks acetone and IPA. Users are responsible for ordering of their own chemicals and materials Auxiliary - No additional charge

Please see clean room staff to pick up your reserved stock room item.

Auxiliary No additional charge

Please see clean room staff to pick up your reserved stock room item.

Clean Room Experimental Bay Discuss with Lab Director Prior to reservation

Entry fee for use of ancillary equipment and supplies.

Labor only costs related to non-instrument related labor of NFL staff

Please see clean room staff to pick up your reserved stock room item.

Please see clean room staff to pick up your reserved stock room item.

Service work only; Internal self-use at the discretion of the Lab Manager. Requires completion of sample application.

Keyence 3D Digital Microscope with a large working distance .1X-5000X Note: all equipment is reserved in increments of 30min Tier 1 Max reservation time is 1 hour, unless approved by Nanofabrication Lab Staff

Raith Electron Beam Lithography/Imaging 150Two Training Requirements Estimates: 4 to 6 hours *Daily Entry Fee is required* Please create a "Daily Entry Fee" reservation in addition to Raith tool reservation. The Raith 150two is an electron beam write system that can image to less than 10 nanometers. Main Applications: Nano-lithography, Imaging Up to 30kV SE and BSE detectors

Training Time = 1.5hrs Requires a 1.5hr minimum Self Reservation ATTENTION: All crucible and planetary changes are performed by Nano Fabrication Staff only. Au and Pt are not kept in the E-beam. Should you require a specific metal and/or planetary please detail your request in your Reservation. See below for complete list of available materials. There may be additional charges for using precious metals such as Gold and Platinum 4" and 6" capable Evaporation Materials Chrome,Titanium, Nickel, Tantalum, Silver, Gold, Germanium, Cobalt, Tin, Silicon, Silicon Dioxide, Palladium, Titanium Dioxide, Hafnium Oxide, Platinum, Aluminum, Aluminum Oxide, Copper CHA 6 Pocket Electron Beam Evaporator that also has a thermal source. This system is capable of “Co-Deposition” i.e. the capability to co-deposit two materials simultaneously using two separate evaporation sources. Each evaporation source has its own thickness monitor for independent rate control so that the ratios of the two materials can be precisely controlled. The CHA solution system is designed to do both lift off (uni-directional) and conformal coatings. http://www.chaindustries.com/solution.html

Note: all equipment is reserved in increments of 30min The Alpha SE provides the University with a unique capability for measuring very thin dielectric films (<100 nm) and calculating the index of refraction of said films. It is also capable of measuring liquids which is of use to the Bio Bay users. JA Woolam also provides a applications and support staff of 9 engineers to assist researchers. This tool is critical for completing a measurement suite (with the Filmetrix) to measure materials thinner than 100nm and films that cannot be measured at normal incidence.

Note: all equipment is reserved in increments of 30min The Clean Room Entrance Fee is required in addition to the hourly rate. Please book both the tool and the "Clean Room Entrance".